| 2004-05-10 | Sale | Onto Innovation Inc. ONTO | director | 3,400 0.0169% | $7.88 | $26,775 | +3.07% | |
| 2004-03-01 | Sale | Onto Innovation Inc. ONTO | director | 3,300 0.0105% | $7.88 | $25,988 | -32.38% | |
| 2003-11-18 | Sale | Onto Innovation Inc. ONTO | director | 3,300 0.025% | $12.35 | $40,755 | +3.59% | |
| 2003-11-18 | Onto Innovation Inc. ONTO | director | 3,300 0.025% | $12.35 | $40,755 | +3.59% |