| 2023-05-25 | Sale | Axcelis Technologies, Inc. ACLS | EVP & Chief Financial Officer | 2,313 0.0069% | $148.00 | $342,324 | -13.15% | |
| 2023-05-16 | Sale | Axcelis Technologies, Inc. ACLS | EVP & Chief Financial Officer | 6,505 0.02% | $130.84 | $851,114 | +4.07% | |
| 2023-05-11 | Sale | Axcelis Technologies, Inc. ACLS | EVP & Chief Financial Officer | 10,546 0.0322% | $125.06 | $1.32M | +8.08% | |
| 2022-11-15 | Sale | Axcelis Technologies, Inc. ACLS | EVP & Chief Financial Officer | 6,500 0.0201% | $79.26 | $515,177 | +68.05% | |
| 2022-08-15 | Sale | Axcelis Technologies, Inc. ACLS | EVP & Chief Financial Officer | 8,961 0.0268% | $75.30 | $674,763 | +55.65% | |
| 2022-03-02 | Sale | Axcelis Technologies, Inc. ACLS | EVP & Chief Financial Officer | 8,636 0.0257% | $70.89 | $612,206 | -8.19% | |
| 2021-08-27 | Sale | Axcelis Technologies, Inc. ACLS | EVP & Chief Financial Officer | 8,656 0.0252% | $50.39 | $436,176 | +19.53% | |
| 2021-08-26 | Sale | Axcelis Technologies, Inc. ACLS | EVP & Chief Financial Officer | 9,409 0.0285% | $49.10 | $461,982 | +27.54% | |
| 2020-05-02 | Sale | Axcelis Technologies, Inc. ACLS | EVP & Chief Financial Officer | 20,000 0.0706% | $26.27 | $525,400 | ||
| 2020-02-11 | Sale | Axcelis Technologies, Inc. ACLS | EVP & Chief Financial Officer | 38,673 0.1188% | $29.04 | $1.12M | -10.15% | |
| 2019-12-09 | Sale | Axcelis Technologies, Inc. ACLS | EVP & Chief Financial Officer | 24,389 0.0747% | $22.56 | $550,216 | +8.29% | |
| 2017-11-13 | Sale | Axcelis Technologies, Inc. ACLS | EVP & Chief Financial Officer | 89,280 0.218% | $26.23 | $2.34M | -36.06% | |
| 2017-09-12 | Sale | Axcelis Technologies, Inc. ACLS | EVP & Chief Financial Officer | 99,848 0.2316% | $16.43 | $1.64M | +7.84% | |
| 2017-08-22 | Sale | Axcelis Technologies, Inc. ACLS | EVP & Chief Financial Officer | 34,678 0.0752% | $13.97 | $484,625 | +18.57% | |
| 2017-05-26 | Sale | Axcelis Technologies, Inc. ACLS | EVP & Chief Financial Officer | 112,500 0.3607% | $21.92 | $2.47M | +9.4% | |
| 2017-05-25 | Sale | Axcelis Technologies, Inc. ACLS | EVP & Chief Financial Officer | 75,000 0.158% | $14.18 | $1.06M | +11.14% | |
| 2017-02-13 | Sale | Axcelis Technologies, Inc. ACLS | EVP & Chief Financial Officer | 37,752 0.1277% | $16.42 | $619,881 | +41.35% | |
| 2017-02-07 | Sale | Axcelis Technologies, Inc. ACLS | EVP & Chief Financial Officer | 292 0.001% | $16.50 | $4,818 | +43.57% | |
| 2017-02-06 | Sale | Axcelis Technologies, Inc. ACLS | EVP & Chief Financial Officer | 99,456 0.337% | $16.49 | $1.64M | +39.91% | |
| 2016-05-06 | Axcelis Technologies, Inc. ACLS | EVP & Chief Financial Officer | 10,000 0.0084% | $2.45 | $24,500 | +36.5% |