| 2012-02-13 | Sale | Axcelis Technologies, Inc. ACLS | EVP, Customer Operations | 30,000 0.0274% | $1.66 | $49,800 | -31.18% | |
| 2012-02-10 | Sale | Axcelis Technologies, Inc. ACLS | EVP, Customer Operations | 28,000 0.0262% | $1.70 | $47,600 | -31.76% | |
| 2011-02-08 | Sale | Axcelis Technologies, Inc. ACLS | EVP, Customer Operations | 99,480 0.0811% | $2.43 | $241,419 | -41.64% | |
| 2010-12-09 | Sale | Axcelis Technologies, Inc. ACLS | EVP, Customer Operations | 30,000 0.0277% | $3.11 | $93,301 | -45.6% | |
| 2010-11-30 | Sale | Axcelis Technologies, Inc. ACLS | EVP, Customer Operations | 25,000 0.0239% | $2.51 | $62,750 | -28.23% | |
| 2010-11-08 | Sale | Axcelis Technologies, Inc. ACLS | EVP, Customer Operations | 30,000 0.0287% | $2.61 | $78,369 | -27.52% |