| 2023-05-16 | Sale | Axcelis Technologies, Inc. ACLS | director | 15,000 0.0457% | $129.50 | $1.94M | +4.07% | |
| 2023-05-09 | Sale | Axcelis Technologies, Inc. ACLS | director | 10,000 0.0302% | $118.50 | $1.19M | +12.77% | |
| 2023-02-01 | Sale | Axcelis Technologies, Inc. ACLS | director | 1,700 0.0057% | $127.12 | $216,104 | +17.45% |